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» Magnetic Fluid Seals
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Custom Molded Products
Diaphragms
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Magnetic Fluid Seals
Magnetic Fluid Vacuum Seals Brochure
Standard catalog or custom designs
Simple axial, multi-axial, and linear translating designs
Excellent high temperature capabilities
Low vapor pressure
High corrosion resistance designs available
Proprietary magnetic fluid and bearing lubrication
Compact designs to minimize space requirements
Applications
Deposition: LPCVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD
Ashing
Plasma etch: poly, oxide and metal
Metalization: PVD
Ion Implant
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