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Magnetic Fluid Seals

  • Magnetic Fluid Vacuum Seals Brochure
  • Standard catalog or custom designs
  • Simple axial, multi-axial, and linear translating designs
  • Excellent high temperature capabilities
  • Low vapor pressure
  • High corrosion resistance designs available
  • Proprietary magnetic fluid and bearing lubrication
  • Compact designs to minimize space requirements

Applications

  • Deposition: LPCVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD
  • Ashing
  • Plasma etch: poly, oxide and metal
  • Metalization: PVD
  • Ion Implant