Magnetic Fluid Seals
- Magnetic Fluid Vacuum Seals Brochure
- Standard catalog or custom designs
- Simple axial, multi-axial, and linear translating designs
- Excellent high temperature capabilities
- Low vapor pressure
- High corrosion resistance designs available
- Proprietary magnetic fluid and bearing lubrication
- Compact designs to minimize space requirements
Applications
- Deposition: LPCVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD
- Ashing
- Plasma etch: poly, oxide and metal
- Metalization: PVD
- Ion Implant
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